| 摘要 |
A method of scanning a workpiece surface is disclosed in which a machine carrying a scanning head is moved along a path, preferably at constant velocity, while a surface contacting device is moved by the scanning head to oscillate transversely to the instantaneous path direction to scan an area of the surface. Transducers on the machine, the head, and where necessary the surface contacting device provide data relating to the positions of the surface contacting device to data gathering device under the control of a computer. Apparatus for carrying out the method is also disclosed and includes a scanning head for moving the surface detecting device which may be a stylus or a probe relative to one axis, and preferably orthogonal axes. The head can include a set-up for inertia balancing the head and mass balancing the surface detection device. Also the head may include air bearings on which the stylus or probe are supported for oscillation. Surfaces to be scanned may be flat plates, cones, bores or other surfaces with compound angles.
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