| 摘要 |
PURPOSE:To efficiently produce the high-purity washing water suitable for washing of semiconductors, etc. CONSTITUTION:Raw water is subjected to a reverse osmosis membrane treatment and ultrafiltration treatment and is then treated by the biscuit ceramics constituted by reduction calcination of a cylindrical molding consisting essentially of the Palaeozoic era clay contg. fossil layers and monazite as effective components while the water is kept aerated or is kept irradiated with UV rays, by which the washing water is produced. |
