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发明名称
DRY ETCHING METHOD USING HBR OR BR
摘要
申请公布号
KR930001500(B1)
申请公布日期
1993.03.02
申请号
KR19890001415
申请日期
1989.02.08
申请人
FUJITSU LTD.
发明人
NAKAMURA, MORIDAKA;KURIMOTO, TAKASHI;ITSUKA, KATSUHIKO
分类号
H01L21/28;H01L21/311;H01L21/3213;H01L29/423;(IPC1-7):H01L21/302
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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