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发明名称
EVALUATION OF RELIABILITY OF METAL LIC WIRING
摘要
申请公布号
JPH0547889(A)
申请公布日期
1993.02.26
申请号
JP19910034879
申请日期
1991.03.01
申请人
MATSUSHITA ELECTRON CORP
发明人
NOBORIKAWA ICHIRO
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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