LSI PATTERN DIAGNOSTIC SYSTEM

摘要

PURPOSE:To extract from pattern data a region in the presence of a pattern configuration of high incidence of defects in the manufacturing process or a pattern configuration which demands working precision in device characteristics. CONSTITUTION:When a pattern data 101 is commanded to detect a location where, for example, importance ranks 1-3 of defective cases may occur, a retrieval condition preparer 103 retrieves defective cases of importance ranks 1-3 out of a defective case storage 105 via a defective case data processor 104. A pattern configuration extractor 107 extracts pattern data of defects or around out of the pattern data 101 to display it on a displayer 109. This process makes diagnosis of LSI patterns using past defective cases.