| 摘要 |
<p>PURPOSE:To make it possible to detect an operating state even when an operation signal is generated in an irregular period with regard to an operating efficiency meter available for a semiconductor manufacturing apparatus. CONSTITUTION:An operating efficiency meter comprises a signal detection unit 3 for taking always an operation signal 2 directly from a semiconductor manufacturing apparatus 1, a semiconductor storage unit 4 for storing data of the time the operation signal 2 is generated and for discriminating between operation and non-operation states, and a data transfer unit 6 for transferring the stored data from the semiconductor storage unit 4 to an external storage unit 5. The period of the operation signal 2 is set with a flexible time width so that the operation and non-operation states can be adequately compared and discriminated. In this way, the semiconductor manufacturing apparatus 1 has a mechanism that can measure the operating efficiency.</p> |
