发明名称 CHARGED PARTICLE BEAM PLOTTING APPARATUS
摘要 PURPOSE:To perform a fine pattern checking. CONSTITUTION:When a decoder 8 judges pattern data from a pattern data storage memory 3 as a rectangular or trapezoidal shape, it sends a signal to an R or S terminal of a flip-flop 9. When the flip-flop 9 subsequently receives the signal at the same terminal, it does not change its output, and when the flip-flop 9 receives a signal at different terminal immediately before, it changes its output. When the output of the flip-flop 9 is changed, a pulse generator 10 generates a pulse, and when it is not changed, the generator 10 generates a signal of a low state ('0'). A first counter 11 counts pulses generated from the generator 10. A second counter 14 counts up when the generator 10 generates a '0' signal. A calculator 15 adds the counted values of the first and second counters, and further adds '1' thereto.
申请公布号 JPH0547647(A) 申请公布日期 1993.02.26
申请号 JP19910230998 申请日期 1991.08.19
申请人 JEOL LTD 发明人 NAKANODA SHINJI
分类号 H01L21/027 主分类号 H01L21/027
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