TESTING METHOD FOR SEMICONDUCTOR CHIP

摘要

PURPOSE:To indicate operation to a prober in case of NG and to eliminate defective contact by making a host computer have informations of NG during contact check of automatic set-up sequence of a prober. CONSTITUTION:In case of IG as a result of contact check, an IC tester 12 informs a host computer 13 of measured detailed data. The host computer judges an indication to a prober 11 by informations from the prober 11 and an IC test and gives an indication to the prober 11. Contact check is carried out again. In case of NG, the host computer 13 collects detailed informations of NG from the prober 11 and the IC tester 12 and indicates each treatment to the prober 11. In case of another NG of the second contact check, other treatment is also carried out for removing causes thereof and contact check is performed again. Therefore, it is possible to determine various causes in the process of contact check and to remove them.