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发明名称
METHOD AND APPARATUS FOR ETCHING WAFER
摘要
申请公布号
JPH0547739(A)
申请公布日期
1993.02.26
申请号
JP19910223690
申请日期
1991.08.09
申请人
FURUKAWA ELECTRIC CO LTD:THE
发明人
MATSUSHITA HIROYUKI
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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