| 摘要 |
<p>PURPOSE:To obtain an oxide superconductor chip in which moisture deterioration of an oxide superconducting film is prevented and which has an excellent cutting accuracy by providing a water-resistant protective film on an element unit on a board, adhesively securing the board to a dicing tape therethrough, and dicing the board to element units. CONSTITUTION:A water-resistant protective film 11 is provided on a plurality of element units 21 made of an oxide superconductive film pattern on a board 2. A board 2 provided with the film 11 is adhered fixedly to a dicing tape 3 through the film 11. The board 2 secured to the tape 3 is diced to element units 21 from the board 2 side by supplying coolant, cleanser, etc., by using a cutter such as a diamond saw, and an oxide superconductor chip 22 is obtained. Thus, it can be desirably used for a case where a device applied by superconduction of a diode, a transistor, a sensor, etc., and particularly a small-sized device is mass producted, etc.</p> |
