| 摘要 |
PURPOSE:To concurrently make spectral diffraction on electrons emitted from various positions of a sample and two-dimensionally analyze the sample in a short time. CONSTITUTION:A grid 17 made of a conductor with openings corresponding to photo-diodes 14 is provided on the front face of a diode array 15 constituted of two-dimensionally aligned fine photo-diodes 14, and the blocking voltage Vb applied to the grid 17 is scanned to detect the energy distribution. An electron lens 50 diffusing photoelectrons is provided between a sample and the grid 17 to improve the positional resolution. |
