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发明名称
COMPOUND SEMICONDUCTOR ULTRAFINE PARTICLE VAPOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH0547664(A)
申请公布日期
1993.02.26
申请号
JP19910200433
申请日期
1991.08.09
申请人
NIPPON SHEET GLASS CO LTD
发明人
OTSUKA SHUNSUKE;KOYAMA TADASHI;NAGATA HISAO
分类号
H01L21/203;H01S3/108
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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