| 摘要 |
A circuit for producing low-pressure plasma in a technological chamber, containing a single-phase transformer, whose secondary winding is connected via a capacitor with two terminals, to which in one branch a rectifying valve, and in the second branch, the technological chamber and the second rectifying valve are connected according to patent No. 148 143 characterised in that it has two additionally connected rectifying valves (P3 and P4) and a two-position switch (P), which in position (2) of the valve creates a bridge circuit with four rectifying valves (P1, P2, P3, P4), which is connected in its input, via a capacitor (C), to the secondary winding of the transformer (Tr), and in its output - to the terminals of the technological chamber.<IMAGE>
|
