摘要 |
A hydraulic servo valve suitable for controlling flow of a pressurized fluid in dirty and explosive environments, comprises a control valve actuated by a contamination-free sealed pilot circuit of electroviscous fluid commanded by electroviscous valves requiring minimal electrical power. Fluid is circulated in the pilot circuit by pressure pulses derived from the pressurized fluid by means of a fluidic oscillator and transmitted to the pilot circuit via flexible diaphragms. |