VERFAHREN UND VORRICHTUNG ZUR BESTIMMUNG EINER LINIENMITTE IN EINEM MIKROMINIATURELEMENT.,申请号DE19896004426-传众专利搜索

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发明名称	VERFAHREN UND VORRICHTUNG ZUR BESTIMMUNG EINER LINIENMITTE IN EINEM MIKROMINIATURELEMENT.
摘要
申请公布号	DE68904426(D1)	申请公布日期	1993.02.25
申请号	DE19896004426	申请日期	1989.07.08
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US	发明人	KALLMEYER, ING.-GRAD., MICHAEL, W-7030 BOEBLINGEN, DE;WAGNER, DIETMAR, W-7000 STUTTGART 50, DE
分类号	G01B11/00;G01B11/02;H01L21/66;(IPC1-7):G01B11/02	主分类号	G01B11/00
代理机构		代理人
主权项
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