Determining orientation of crystal grid of silicon@ component - illuminating 110 plane surface by linearly polarised light, analysing and filtering reflected light and rotating component until corresp. electrical signal attains defined value

摘要

The registration method involves illuminating the surface of the rotatably mounted part and converting the reflected light into an electrical measurement parameter which is evaluated to determine the orientation. For a silicon part with a surface in the (110) plane the surface is illuminated with linerly polarised light. The reflected light (7) passes through an analyser (8) of defined polarisation direction and a filter (9) into the detection device (10) and is converted into an electrical parameter proportional to the light intensity. The part is rotated until the parameter attains a predefined value. USE/ADVANTAGE - Enables orientation of crystal grid of silicon part to be determined at relatively low cost.