Method of and device for the measurement of an electric signal in an electronic component

摘要

The method involves utilising a pulsed radiation source (9) delivering a measurement radiation beam of specified pulse width during each period of an activating test signal. The radiation emanating from the electronic component (5) is converted into an electric signal by a radiation sensitive detector (3). The source of radiation is controlled to supply a number of series of radiation pulses with each series consisting of two sub-series with the first having a constant phase relation relative to the test signal. The second sub-series has a constant phase relation relative to the first sub-series and in subsequent series the second subseries are phase shifted relative to the first subseries and are compared to each other to obtain the measurement signal.