| 发明名称 |
Calibration system for ultra high purity gas analysis. |
| 摘要 |
<p>A calibration device is provided for rapidly delivering ultra high purity calibration gas mixtures, and sample gas, to a gas analyzer at elevated temperature conditions. Steady flow rates are desirably provided to the highly sensitive analyzer. <IMAGE></p> |
| 申请公布号 |
EP0528386(A2) |
申请公布日期 |
1993.02.24 |
| 申请号 |
EP19920113931 |
申请日期 |
1992.08.14 |
| 申请人 |
PRAXAIR TECHNOLOGY, INC. |
发明人 |
LEGGERT, GREGORY HOWARD;SONRICKER, MICHAEL HAROLD |
| 分类号 |
B01F3/02;G01N33/00 |
主分类号 |
B01F3/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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