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发明名称
摘要
申请公布号
JPH057239(Y2)
申请公布日期
1993.02.24
申请号
JP19870008306U
申请日期
1987.01.23
申请人
发明人
分类号
H01L21/31;C23C16/44;F16J15/14;H01L21/205;(IPC1-7):C23C16/44
主分类号
H01L21/31
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