| 摘要 |
PURPOSE:To obtain an apparatus which can capture the characteristic X rays from the surface of an excited sample and can analyze the component of the surface of the sample and wherein an energy dispersion type X-ray detector for capturing the characteristic X rays can be readily attached and removed. CONSTITUTION:An energy source for emitting energy particles into a sample 1 and an energy dispersion type X-ray detector 18 are attached to a vacuum container 20 for containing a sample 1. A connecting chamber 79 which is freely evaluated into the vacuum state is independently formed for the vacuum container 20. The energy dispersion type X-ray detector 28 is attached to the connecting chamber 79 so that the detector can be freely attached and removed. The characteristic X rays emitted from the surface of the excited sample 1 are captured at the total reflection angle. Thus, the component of the thin film of the surface of the sample 1 can be analyzed. When, the energy dispersion type X-ray detector 28 is removed from the connecting chamber 79, the detector can be removed without breaking the vacuum state of the vacuum container 20. |
