| 摘要 |
PURPOSE:To improve the detecting accuracy at the thin part of the surface of a sample by emitting X rays on the sample at a low incident angle, generating fluorescence X rays from the sample, and taking out the X rays in the vicinity of the total reflection angle of the X rays with an energy-dispersion type X-ray detector. CONSTITUTION:X rays are emitted from an X-ray generator 48 on the surface of a sample 1 at an incident angle of about 4 deg. or less. Then, the part of the surface is excited, and the fluorescence X rays (characteristic X rays) are emitted. The characteristic X rays are rapidly increased at the specified take-out angle of 4 deg. or less (total reflecting angle). At this angle, the characteristic X rays are taken out with a probe 30 of an energy-dispersion X-ray detector 28. Thus, the characteristic X rays corresponding to the component of the thin film of the surface of the sample can be specified. With the incident angle of the X rays as THETAg, a diffraction-X-ray detecting device 18 is moved up and down along a rail member 17. The X-ray taking-out angle is adjusted so that the angle becomes 2THETAg with respect to the extending line of the X rays in the incident direction. Under this state, the sample 1 and the detecting device 18 are turned by the specified angle at the same time. Thus, the X-ray diffraction peak of the surface part of the sample can be detected. |
