| 摘要 |
PURPOSE:To provide highly precise parallelism and flatness and enhance yield by detecting the pressure and displacement in each part of a work piece, and operating an actuator so that the pressure distribution of each part of the work piece is regularly constant. CONSTITUTION:A plurality of sensors 11 are placed on a lower lapping disc 2 to detect the pressure added to a work piece 7 and the displacement of the lower lapping disc 2 by the added pressure. According to the pressure and the displacement, an actuator situated on each upper lapping disc 1 is operated to keep the pressurization to the work piece 7 uniform, and the pressurizing force is feedback-controlled so that the displacement by the pressurization to the work piece 7 is uniformed. Thus, the work piece is uniformly polished, the flatness and parallelism of the work piece is consequently enhanced, and the yield is improved. |
