发明名称 |
METHOD AND APPARATUS FOR CO-ORDINATE MEASURING USING A CAPACITANCE PROBE |
摘要 |
The surface parameters and characteristics of a conductive workpiece are determined by applying a voltage between the workpiece and a capacitance probe having proximity sensing capabilities, and moving the probe in two or three co-ordinate axes relative to the workpiece while measuring the capacitance between the probe and workpiece, and controlling the probe velocity and/or direction within a stand-off band adjacent to the workpiece as a function of the capacitance value measured for purposes of effecting significant real time process controls, and determining the workpiece surface parameters as a function of the probe movement and capacitance measured.
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申请公布号 |
US5189377(A) |
申请公布日期 |
1993.02.23 |
申请号 |
US19900577021 |
申请日期 |
1990.09.04 |
申请人 |
EXTRUDE HONE CORPORATION |
发明人 |
RHOADES, LAWRENCE J.;RESNICK, RALPH L.;ROSE, JOHN R. |
分类号 |
G01B7/34;G01B7/004;G01B7/28;G01N13/20;G01N37/00 |
主分类号 |
G01B7/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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