| 摘要 |
PURPOSE:To obtain a green sheet for LSI circuit board having good dimensional precision by impregnating a cloth comprising a ceramic and glass fibers with a slurry containing ceramics, glass or their mixture, a resin, a plasticizer and a solvent. CONSTITUTION:While inorganic woven fabric 3 comprising ceramic and glass fibers is impregnated with a slurry 2 comprising ceramics, glass or these mixture, a binder resin, a plasticizer and a solvent such as acetone or 2-butanone filled, in a doctor blade 1, the impregnated fabhric is tape-cast on a carrier tape 4 comprising a polyester film byt he use of the doctor blade to obtain the objective green sheet 5 substantially not shrinking when baked and capable of compensating the dimensional precision. Penetrated holes 6 and conductor wirings are formed in the green sheet 5, and the treated green sheet 5 is laminated and subsequently baked to obtain a multilayer ceramic circuit board 8. |
