| 摘要 |
PURPOSE:To improve the reliability and reproducibility of a carbon dioxide sensor. CONSTITUTION:A silicon substrate 8 of this carbon dioxide sensor is anisotropically etched to form a hole with an inclined etching surface. An oxide film 9 is formed on the surface of the substrate 8, and therefore an insulating substrate is formed. Then, an anode 1 and a cathode 2 are provided over the surface of the substrate from the bottom of the hole. After a gel 6 containing an electrolyte including chlorine ions and autotrophism bacteria is filled in the hole, the upper surface of the hole is covered with a gas permeable film. At least the cathode 2 is formed of silver, and the gas permeable film is constituted of two layers 7, 11. |
