AIR PURIFYING DEVICE FOR CLEAN ROOM

摘要

PURPOSE:To enable high-efficient removal of a trace amount of a gas component contained in circulating air in a clean room. CONSTITUTION:A high voltage discharge part 17 is located in an circulating air passage 8 of a clean room 1 and a filter 20 for collecting particle, an ozone decomposition catalyst layer 18, and an adsorbent layer 19 are formed on the downstream of the high voltage discharge part.