| 摘要 |
PURPOSE:To obtain a state length-measuring device which measures a position accurately while measuring a length when a stage travels for a long distance exceeding a length-measurement section of a length-measuring equipment. CONSTITUTION:In a stage-measuring device which is provided with a stage for transportation a specified object to a specified position, a first length- measuring means 2 for measuring length of a stage position in a first traveling direction o the stage, and a second length-measuring means 3 for measuring length of the stage position in a direction which is perpendicular to the first traveling direction, the second length-measuring means 3 has a plurality of length-measuring equipment 7a and 7b with a specified length-measuring section and a plurality of length-measuring equipment 7a and 7b are placed so that they have an overlapping section in a specified range with a length-measuring section of adjacent length-measuring equipment. When the stage reaches the overlapping section of the length-measuring section according to traveling of the stage, a length-measuring value of the first length-measuring equipment 7a which was performing length measurement of the stage position before is set to the second length-measuring equipment 7b which cannot perform measurement of length of the stage position newly. |
