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发明名称
METHOD AND DEVICE FOR FORMING THIN FILM ELEMENT
摘要
申请公布号
JPH0544033(A)
申请公布日期
1993.02.23
申请号
JP19910197886
申请日期
1991.08.07
申请人
CANON INC
发明人
NISHIMURA NAOKI
分类号
C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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