| 摘要 |
PURPOSE:To correct fault so that the double correcting part is as little as possible by deciding a slit size of a rectangle variable slit based on the position information and the shape information of a fault from a picture processor and controlling the movement of a XY stage based on the above. CONSTITUTION:The rectangle variable slit of a slit plate 4 has a definite width y preliminarily decided to Y direction, and has a variable width X to X direction. This variable width x is changed based on the shape information of a fault part sent from a control part 7. A mounting stand 5 on which a sample 8 is mounted is mounted on the XY stage 6, and the movement the XY stage 6 is controlled based on the position information of the fault part from the controlling part 7. That is, the position of the sample 8 against the rectangle variable slit is controlled with the position information the fault part from the control part 7. Therefore, all arbitrary shape can be corrected so that the double corrected part is made as little as possible. |
