| 摘要 |
PURPOSE:To obtain an X-ray irradiating apparatus which can prevent the charging of the surface of an insulator sample. CONSTITUTION:An X-ray irradiating apparatus is constituted by providing a container 101, wherein the pressure in the inside can be reduced, an emitting means 102 for emitting X rays toward a material to be irradiated 103 on a holding part, which is arranged in the container 101, and a means for measuring the photoelectrons discharged by the irradiation with the X rays by using a detector 104. A light projecting means 106 for projecting ultraviolet rays on gas, which is introduced into the container 101, is provided. |
