| 摘要 |
PURPOSE:To obtain a low price angular velocity sensor with a small temperature offset output variation in a wide temperature range. CONSTITUTION:By coupling vibration parts l, 2 constituted by arranging a driving element and detection element nearly perpendicularly, a tuning fork vibration material is configurated. And the vibration parts l, 2 are twisted nearly rectangularly roughly in the middle of plane metal plates 3, 4 using slits provided from the end to the middle part of the width as to be alternate in the length direction. And piezoelectric elements 5, 6 are attached on both side surfaces of the bended parts 3a, 4a. |
