| 摘要 |
PURPOSE:To obtain a compound microscope with an optical microscope under which a sample for AFM measurement can be observed. CONSTITUTION:This compound microscope has an optical microscope equipped with an objective 61 and observatory optical system and interatomic force lever 53 which is provided with a reflecting surface and detects interatomic forces. In addition, the microscope also has a light emitting optical system which irradiates the lever 53 with a spotlight, detector 54 which detects the displacement of reflected light caused by the displacement of the lever 53, and sample table 55 on which a sample 57 is placed. |
