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发明名称
FILM FORMING APPARATUS
摘要
申请公布号
JPH0541379(A)
申请公布日期
1993.02.19
申请号
JP19910195286
申请日期
1991.08.05
申请人
HITACHI LTD
发明人
OKUYA KEN;FURUKAWA RYOICHI;KUROKOME MATSUO;OGISHI HIDEJI;OKADA DAISUKE;YATSUDA YUJI;KABEYA SHINICHI
分类号
H01L21/203;H01L21/28;H01L21/285;H01L21/3205;H01L23/52
主分类号
H01L21/203
代理机构
代理人
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