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发明名称
MANIPULATOR FUER MECHANISCHE STANDARDKOPPELSYSTEME.
摘要
申请公布号
DE3686943(T2)
申请公布日期
1993.02.18
申请号
DE19863686943T
申请日期
1986.08.25
申请人
ASYST TECHNOLOGIES, MILPITAS, CALIF., US
发明人
BONORA, CHARLES, ANTHONY, MENLO PARK, CA 94025, US;O'SULLIVAN, WILLIAM, ANDREW, GILROY, CA 95020, US
分类号
B65G47/90;B65D85/86;B65G47/52;B65G49/00;B65G49/07;H01L21/02;H01L21/673;H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
B65G47/90
代理机构
代理人
主权项
地址
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