| 发明名称 |
Method for preparing a superconducting thin film of compound oxide. |
| 摘要 |
<p>Method for preparing a superconducting thin film of compound oxide on a substrate (6) by laser evaporation technique. A surface of a target (7) onto which a laser beam, impinges is curved in such a manner that a created plume diverges. <IMAGE></p> |
| 申请公布号 |
EP0527668(A1) |
申请公布日期 |
1993.02.17 |
| 申请号 |
EP19920402183 |
申请日期 |
1992.07.29 |
| 申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
NAGAISHI, TATSUOKI;NAKANISHI, HIDENORI;TANAKA, SABURO;ITOZAKI, HIDEO |
| 分类号 |
C23C14/28;C30B29/22;H01B12/06;H01B13/00;H01L21/268;H01L39/24 |
主分类号 |
C23C14/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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