DYNAMIC RANDOM ACCESS MEMORY DEVICE INCLUDING STACKED CAPACITORS EACH HAVING A LOWER ELECTRODE ALIGNED WITH AN UPPER ELECTRODE WITHOUT TOLERANCE AND PROCESS OF FABRICATION THEREOF,申请号US19910651065-传众专利搜索

发明名称	DYNAMIC RANDOM ACCESS MEMORY DEVICE INCLUDING STACKED CAPACITORS EACH HAVING A LOWER ELECTRODE ALIGNED WITH AN UPPER ELECTRODE WITHOUT TOLERANCE AND PROCESS OF FABRICATION THEREOF
摘要
申请公布号	US5187549(A)	申请公布日期	1993.02.16
申请号	US19910651065	申请日期	1991.02.05
申请人	NEC CORPORATION	发明人	FUJII, TAKEO
分类号	H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108	主分类号	H01L27/04
代理机构		代理人
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