METHOD FOR GENERATION AND COLLECTION OF ULTRA FINE PARTICLES WITHOUT SCATTER

摘要

A method of producing fine particles of a material by evaporating the material into an inert gas. The material is evaporated in a evaporation vessel and the fine particles are generated by cooling the evaporated material with the inert gas blown into the evaporated material from the evaporation vessel. The flow of the fine particles is restricted within a path from the evaporation vessel toward a deposit holding body by means of a scatter preventing wall around the path. The fine particles are deposited on the surface of the evaporation vessel and then receovered.