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发明名称
摘要
申请公布号
JPH0511656(B2)
申请公布日期
1993.02.16
申请号
JP19870092156
申请日期
1987.04.16
申请人
INTAANASHONARU BIJINESU MASHIINZU CORP
发明人
TOOMASU NERUSON JAKUSON;ARAN UIRISU KURAINSEISAA;JERII MATSUKUFUAASON UTSUDOORU
分类号
H01L29/812;H01L21/338;H01L29/205;H01L29/66;H01L29/778;H01L39/22
主分类号
H01L29/812
代理机构
代理人
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