Micro-abrading method and micro-abrading tool

摘要

A micro-abrading method wherein an abrading section undergoes a micromotion in the XY-direction parallel with the surface of a workpiece according to the operation of an actuator comprising piezoelectric elements, and an abrading material is held between the abrading section positioned at the lower end of an abrading tool and the workpiece. The phase difference between the X-direction motion and the Y-direction motion is cyclically changed while the abrading section is undergoing the micromotion, and the surface of the workpiece is entirely and uniformly abraded even though a large area is abraded.