| 摘要 |
A composite electrode (10) that is used for conducting a modulated voltage in a plasma reactor. An electrically conductive non-oxidizing surface and an electrically conductive metal surface are electrically and mechanically joined together by threads (12 and 13) to form a composite electrode (10). The composite electrode (10) is used to make contact between a wafer holder and the plasma reactor when the wafer holder is at rest in a chamber of the reactor.
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