| 摘要 |
A metrology system measures the depth and width of a trench in a sample to be tested with a probe moved relative to the sample. The system detects the proximity of the probe to a sample and to the side walls of the trench, providing output signals indicating the vertical and transverse relationship of the probe to the sample. The system adjusts the relative position of the probe and the sample vertically and transversely as a function of the output signals. The probe has three protuberances to detect the depth and width of the trench. One protuberance extends down to sense the bottom of the trench. Lateral protuberances extend in opposite directions (across the width of the trench) from the probe to detect the side walls of the trench. Forces on the protuberances are measured to determine the depth and the location of the side walls of the trench.
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