发明名称 |
Apparatus for servicing of semiconductor manufacturing equipment |
摘要 |
A mobile container cart includes a pivoting mechanism for pivoting the container from a horizontal position to approximately 85-90 degree vertical position. The container rests atop the cart and has removable side and top plates. A semiconductor processing equipment assembly is loaded into the container while still hot. The container is sealed and pivoted to its vertical position for transport. Once at a servicing area, the container is repositioned horizontally and the top and side plates are removed. The cart now functions as a work bench for disassembling, servicing and reassembling the device. Diagnostics can be performed while the device is in the service area.
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申请公布号 |
US5186597(A) |
申请公布日期 |
1993.02.16 |
申请号 |
US19910749016 |
申请日期 |
1991.08.23 |
申请人 |
SEMATECH, INC.;NCR CORPORATION |
发明人 |
BULSTERBAUM, J. CHARLES;TOLLES, ROBERT D.;COSTELLO, DONALD A. |
分类号 |
B65G49/07;H01L21/673;H01L21/677 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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