| 摘要 |
PURPOSE:To make the divided processing of an alpha-Si film needless by a method wherein an upper electrode of one element is connected to a lower electrode of adjoining element for series-connection of alpha-Si unit photoelectric conversion elements making use of the transfer phenomenon of silver with which the lower electrode is coated to the alpha-Si film. CONSTITUTION:Transparent electrodes 21, 22 are formed on a glass substrate 1 by a transparent electrode film and then the left side end in the figure of transparent electrodes is coated with silver layers 5 by printing silver paste. Then, an alpha-Si film 3 is formed on the overall surface while rear surface metallic electrodes 41, 42 are formed on the film 3 making the right side ends of metallic electrode oppose to the silver layers 5. Next, the alpha-Si film between the transparent electrode 22 and the rear surface 41 is impressed with a voltage assuming the transparent electrode as plus side by a power supply 6. Resultantly, silver transfer phenomenon occurs to form silver diffused region 7 in the alpha-Si film between the rear surface 41 and the transparent electrode 22. |
