发明名称 ELECTRIC ARC EVAPORATOR
摘要 The electric arc evaporator has an internal evaporating surface and is applicable in the vacuum technologies for deposition of metal coatings. The evaporator forms a metal coating with a significantly reduced drip phase and an increased number and level of ionisation of the deposited particles. The utilisation factor of the evaporating material is increased and the strength of the anode current is reduced. The electric arc evaporator contains a cylindrical cathode, consisting of two cathode bushings (1), whose internal surface has the shape of a truncated cone. The cones are in contact with the sides of their bigger diameters at an angle of 60 to 170 degrees. The cathode bushings (1) are installed in a water-cooled compartment (2). The two anode screens (3) are placed in the water-cooled compartment (2), by using an electric insulator (4), in frontal position to the cathode bushings (1), which are surrounded by the two solenoids (5). The distance between the solenoids is at least equal to the length of the cathode.
申请公布号 BG51114(A1) 申请公布日期 1993.02.15
申请号 BG19890090674 申请日期 1989.12.18
申请人 TEKHNOLOGICHEN INSTITUT PO VAKUUMNI SISTEMI 发明人 KHOVSEPJAN, PAPKEN E.;BOTEV, PLAMEN G.
分类号 C23C4/08;(IPC1-7):C23C4/08 主分类号 C23C4/08
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