PRODUCTION OF GRATING PLATE,申请号JP19910212837-传众专利搜索

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发明名称	PRODUCTION OF GRATING PLATE
摘要
申请公布号	JPH0534513(A)	申请公布日期	1993.02.12
申请号	JP19910212837	申请日期	1991.07.29
申请人	SHIMADZU CORP	发明人	KOEDA MASARU
分类号	C23F4/00;G01B7/34;G01Q40/02;G01Q90/00;G02B5/18;H01J37/20	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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