| 摘要 |
PURPOSE:To provide a multi-dimensional device, e.g. a quantum well fine wire device or a quantum box device which has very little dispersion in dimension and is capable of microminiaturization. CONSTITUTION:A large number of first material layers 12 and second material layers 13 are piled up alternately from the top of a substrate 11 to form a multilayered laminate 14, and a quantum well material is selectively grown on first layers 12 appearing on a vertical or an inclined cross section F on the laminate face to form quantum well fine wires 15. The width of this quantum well fine wire 15 is prescribed by the film thickness of the first layer 12, and its pitch by the film thickness of the second layer 13; therefore, the quantum well device has little dispersion in dimension and is capable of microminiaturization. |
