| 摘要 |
PURPOSE:To obtain pellicle with high reflection preventing effect and little foreign matter by using polyhexafluoropropylene oxide having imidoylamidine polytriazine bond or polytriazine bond with low refractive index layer excelling in solubility and low refractive index. CONSTITUTION:A low refractive index layer constituting a reflection preventing layer is polyimydoilamizine represented by the formula I and/or polytriazine represented by the formula II. In the formula I, Rf0 is a perfluoropolyether chain consisting of a unit represented by (C1F21O) (t = an integer of 1, 2 or 3) and represents divalent radical whose both the ends are a carbon atom. In the formula II, Rf0 is a perfluoropolyether chain consisting of a unit represented by (C1F21O) (t=an integer of 1, 2 or 3) and represents a divalent radical whose both the ends are a carbon atom. |
