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发明名称
PROBE APPARATUS
摘要
申请公布号
JPH0536766(A)
申请公布日期
1993.02.12
申请号
JP19910194246
申请日期
1991.08.02
申请人
TOKYO ELECTRON LTD
发明人
ABE YUICHI
分类号
F24F7/06;H01L21/66
主分类号
F24F7/06
代理机构
代理人
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