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发明名称
METHOD FOR WORKING COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH0536655(A)
申请公布日期
1993.02.12
申请号
JP19910186566
申请日期
1991.07.25
申请人
NEC CORP
发明人
SUGIMOTO YOSHIMASA
分类号
H01L21/203;H01L21/205;H01L21/302
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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