发明名称 COMPOUND SEMICONDUCTOR SINGLE CRYSTAL
摘要 PURPOSE:To obtain a GaP single crystal to be used as a substrate for epitaxial growth of a green luminous element having no decrease of luminence by making Si concentration not exceeding 1X10<17>atoms/cm<3> and/or O-concentration not exceeding 7X10<16>atoms/cm<3>. CONSTITUTION:A condition of suitable impurity concentration as the substrates W1 to W5 for epitaxial growth of a green light emitting diode having no decrease of luminance is that Si concentration is not exceeding 1X10<17>atoms/cm<3> or, in case Si concentration is not less than 1X10<17>, O-concentration is 7X10<16>atoms/cm<3>. That is, in order to have suitable brightness of the green light emitting diode, Si concentration can be not exceeding 1X10<17>atoms/cm<3> and/or O-concentration can be not exceeding 7X10<16>atoms/cm<3>. Thereby, a GaP single crystal to be suitably used as the substrates W1 to W5 for epitaxial growth of the green light emitting element having no decrease of luminance can be obtained.
申请公布号 JPH0537018(A) 申请公布日期 1993.02.12
申请号 JP19910212846 申请日期 1991.07.29
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 MINASE TSUNEYUKI;IKEDA ATSUSHI;OTAKI NORIO
分类号 H01L21/208;C01G15/00;C30B15/00;C30B19/04;H01L21/02;H01L21/20;H01L29/207;H01L33/30;H01L33/40 主分类号 H01L21/208
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